Počet záznamů: 1
Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude
- 1.KOZÁK, T., PAJDAROVA, A.D., ČADA, Martin, HUBIČKA, Zdeněk, MAREŠ, P., ČAPEK, J. Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude. Plasma Sources Science & Technology. 2020, 29(6), 1-10), 065003. ISSN 0963-0252. E-ISSN 1361-6595. Dostupné z: doi: 10.1088/1361-6595/ab8fbb.
Počet záznamů: 1