Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates

Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentev, Vasyl - Kiselev, D.A. - Gerlach, G.
Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates.
Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE). New York: IEEE, 2014 - (Shpotyuk, M.), s. 19-20, č. článku 6912320. ISBN 978-1-4799-5961-7.
[2014 IEEE International Conference On Oxide Materials For Electronic Engineering (OMEE). Lviv (UA), 26.05.2014-30.05.2014]
Obor OECD: Fluids and plasma physics (including surface physics)
http://ieeexplore.ieee.org/document/6912320/
http://hdl.handle.net/11104/0281194