Počet záznamů: 1
Fabrication of diamond based quartz crystal microbalance gas sensor
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SYSNO ASEP 0432192 Druh ASEP C - Konferenční příspěvek (mezinárodní konf.) Zařazení RIV D - Článek ve sborníku Název Fabrication of diamond based quartz crystal microbalance gas sensor Tvůrce(i) Varga, Marián (FZU-D) RID, ORCID
Laposa, A. (CZ)
Kulha, P. (CZ)
Davydova, Marina (FZU-D) RID, ORCID
Kroutil, J. (CZ)
Husák, M. (CZ)
Kromka, Alexander (FZU-D) RID, ORCID, SAIZdroj.dok. Key Engineering Materials : Materials and Applications for Sensors and Transducers III, 605. - Zurich : Trans Tech Publications, 2014 / Hristoforou E. ; Vlachos D.S. - ISSN 1013-9826 - ISBN 9783038350514 Rozsah stran s. 589-592 Poč.str. 4 s. Forma vydání Tištěná - P Akce International Conference on Materials and Applications for Sensors and Transducers /3./ (IC-MAST 2013) Datum konání 13.09.2013-17.09.2013 Místo konání Praha Země CZ - Česká republika Typ akce WRD Jazyk dok. eng - angličtina Země vyd. CH - Švýcarsko Klíč. slova diamond thin film ; low temperature deposition ; quartz crystal microbalance ; gas sensor Vědní obor RIV JB - Senzory, čidla, měření a regulace CEP GAP108/11/0794 GA ČR - Grantová agentura ČR Institucionální podpora FZU-D - RVO:68378271 EID SCOPUS 84900427545 DOI 10.4028/www.scientific.net/KEM.605.589 Anotace Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications. Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures, what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a NCD growth from the H2/CH4/CO2 gas mixture at low temperature (400 °C) by pulsed linear antenna MWCVD plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor, but in addition its sensitivity was twofold to a virgin QCM sensor with a gold active layer. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2015
Počet záznamů: 1