Počet záznamů: 1
PEC reliability in 3D e-beam DOE nanopatterning
- 1.Kolařík, Vladimír - Krátký, Stanislav - Urbánek, Michal
PEC reliability in 3D e-beam DOE nanopatterning.
9th International Conference on Charged Particle Optics. Book of Abstracts. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014. s. 37. ISBN 978-80-87441-11-4.
[International Conference on Charged Parrticle Optics /9./. 31.08.2014-05.09.2014, Brno]
http://hdl.handle.net/11104/0236392
Počet záznamů: 1