Advances in SEM Instrumentation

0205403 - UPT-D 20010043 RIV IT eng C - Konferenční příspěvek (zahraniční konf.)
Frank, Luděk - Müllerová, Ilona
Advances in SEM Instrumentation.
Proceedings of 5th Multinational Congress on Electron Microscopy. Lecce: Rinton Press, 2001 - (Dini, L.; Catalano, M.), s. 503-514. ISBN 1-58949-003-7.
[MCEM '01 /5./ - Multinational Congress on Electron Microscopy. Lecce (IT), 20.09.2001-25.09.2001]
Grant CEP: GA ČR GA202/99/0008
Výzkumný záměr: CEZ:AV0Z2065902
Klíčová slova: Termoemission (TE) cathode * permanent magnet lenses
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

The classical Scanning Electron Microscope seems to have achieved its limits behind which, at least for a near future, hardly any space is available for further improvements. "Classical" means here a microscope with the thermoemission (TE) cathode and constant energy of the primary electron beam throughout the column, adjustable within the range of 1 to 30 keV. CAD tools enabled the manufacrurers to upgrade to resolution to 3 or 3.5 nm at 25 or 30keV, which is not likely to be significantly updated within the conception mentioned.
Trvalý link: http://hdl.handle.net/11104/0101017