Počet záznamů: 1
New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition
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$a 10.1016/j.diamond.2022.109111 $2 DOI 101 0-
$a eng 102 $a CH 200 1-
$a New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition 215 $a 9 s. 463 -1
$1 001 cav_un_epca*0256495 $1 011 $a 0925-9635 $e 1879-0062 $1 200 1 $a Diamond and Related Materials $v Roč. 126, June (2022) $1 210 $c Elsevier 608 $a Article 610 $a boron doped diamond 610 $a large area deposition 610 $a trimethyl borate 610 $a linear antenna microwave CVD 700 -1
$3 cav_un_auth*0224858 $a Marton $b M. $y SK 701 -1
$3 cav_un_auth*0224856 $a Vojs $b M. $y SK 701 -1
$3 cav_un_auth*0280339 $a Michniak $b P. $y SK 701 -1
$3 cav_un_auth*0300075 $a Behúl $b M. $y SK 701 -1
$3 cav_un_auth*0296440 $a Řeháček $b V. $y SK 701 -1
$3 cav_un_auth*0441087 $a Pifko $b M. $y SK 701 -1
$3 cav_un_auth*0287466 $a Stehlík $b Štěpán $p FZU-D $i Polovodiče $j Semiconductors $T Fyzikální ústav AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0100328 $a Kromka $b Alexander $p FZU-D $i Polovodiče $j Semiconductors $T Fyzikální ústav AV ČR, v. v. i. 856 $u https://doi.org/10.1016/j.diamond.2022.109111 $9 RIV
Počet záznamů: 1