Počet záznamů: 1
New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition
- 1.MARTON, M., VOJS, M., MICHNIAK, P., BEHÚL, M., ŘEHÁČEK, V., PIFKO, M., STEHLÍK, Š., KROMKA, A. New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition. Diamond and Related Materials. 2022, 126(June), 109111. ISSN 0925-9635. E-ISSN 1879-0062. Dostupné z: doi: 10.1016/j.diamond.2022.109111.
Počet záznamů: 1