New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition

MARTON, M., VOJS, M., MICHNIAK, P., BEHÚL, M., ŘEHÁČEK, V., PIFKO, M., STEHLÍK, Štěpán, KROMKA, Alexander. New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition. Diamond and Related Materials. 2022, 126(June), 109111. ISSN 0925-9635. E-ISSN 1879-0062. Dostupné z: doi: 10.1016/j.diamond.2022.109111.