Počet záznamů: 1
Hiding e-beam exposure fields by deterministic 2D pattering
- 1.HORÁČEK, Miroslav, KNÁPEK, Alexandr, MATĚJKA, Milan, KRÁTKÝ, Stanislav, URBÁNEK, M., MIKA, Filip, KOLAŘÍK, Vladimír. Hiding e-beam exposure fields by deterministic 2D pattering. In: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 36-37. ISBN 978-80-87441-23-7.
Počet záznamů: 1