Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate

Sobierajski, R., Jacyna, I., Dlužewski, P., Klepka, M.T., Klinger, D., Pelka, J. B., Burian, T., Hájková, V., Juha, L., Saksl, K., Vozda, V., Makhotkin, I., Louis, E., Faatz, B., Tiedtke, K., Toleikis, S., Enkisch, H., Hermann, M., Strobel, S., Loch, R.A., Chalupský, J. Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate. Optics Express. 2016, 24(14), 15468-15477. ISSN 1094-4087. Dostupné z: doi: 10.1364/OE.24.015468