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(100) substrate processing optimization for fabrication of smooth boron doped epitaxial diamond layer by PE CVD
- 1.Mortet, V., Fekete, L., Ashcheulov, P., Taylor, A., Hubík, P., Trémouilles, D., Bedel-Pereira, E. (100) substrate processing optimization for fabrication of smooth boron doped epitaxial diamond layer by PE CVD. In: NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2015, s. 115-119. ISBN 978-80-87294-53-6.
Počet záznamů: 1