Počet záznamů: 1
Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
- 1.Taylor, Andrew - Ashcheulov, Petr - Čada, Martin - Fekete, Ladislav - Hubík, Pavel - Klimša, Ladislav - Olejníček, Jiří - Remeš, Zdeněk - Jirka, Ivan - Janíček, P. - Bedel-Pereira, E. - Kopeček, Jaromír - Mistrík, J. - Mortet, Vincent
Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system.
Physica Status Solidi A. Roč. 212, č. 11 (2015), s. 2418-2423. ISSN 1862-6300. E-ISSN 1862-6319
Impakt faktor: 1.648, rok: 2015
http://hdl.handle.net/11104/0255231
Počet záznamů: 1