Počet záznamů: 1
Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
- 1.Taylor, A., Ashcheulov, P., Čada, M., Fekete, L., Hubík, P., Klimša, L., Olejníček, J., Remeš, Z., Jirka, I., Janíček, P., Bedel-Pereira, E., Kopeček, J., Mistrík, J., Mortet, V. Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system. Physica Status Solidi A. 2015, 212(11), 2418-2423. ISSN 1862-6300. E-ISSN 1862-6319. Dostupné z: doi: 10.1002/pssa.201532183
Počet záznamů: 1