Static and dynamic VHF-deposition of microcrystalline silicon at 140 MHz with rates up to 2.5 nm/s

Strobel, C. - Leszczynska, B. - Leszczynski, S. - Merkel, U. - Kuske, J. - Fischer, D.D. - Albert, M. - Holovský, Jakub - Bartha, J.W.
Static and dynamic VHF-deposition of microcrystalline silicon at 140 MHz with rates up to 2.5 nm/s.
Proceedings of the 29th European Photovoltaic Energy Conference and Exhibition. Berlin: WIP, 2014, s. 1917-1920. ISBN 3-936338-34-5.
[European Photovoltaic Energy Conference and Exhibition /29./. Amsterdam (NL), 22.09.2014-26.09.2014]
http://www.eupvsec-proceedings.com/proceedings?fulltext=holovsky&paper=28281
http://hdl.handle.net/11104/0243779