Static and dynamic VHF-deposition of microcrystalline silicon at 140 MHz with rates up to 2.5 nm/s

Strobel, C., Leszczynska, B., Leszczynski, S., Merkel, U., Kuske, J., Fischer, D.D., Albert, M., Holovský, J., Bartha, J.W. Static and dynamic VHF-deposition of microcrystalline silicon at 140 MHz with rates up to 2.5 nm/s. In: Proceedings of the 29th European Photovoltaic Energy Conference and Exhibition. Berlin: WIP, 2014, s. 1917-1920. ISBN 3-936338-34-5. Dostupné z: http://www.eupvsec-proceedings.com/proceedings?fulltext=holovsky&paper=28281