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Static and dynamic VHF-deposition of microcrystalline silicon at 140 MHz with rates up to 2.5 nm/s
- 1.STROBEL, C., LESZCZYNSKA, B., LESZCZYNSKI, S., MERKEL, U., KUSKE, J., FISCHER, D.D., ALBERT, M., HOLOVSKÝ, J., BARTHA, J.W. Static and dynamic VHF-deposition of microcrystalline silicon at 140 MHz with rates up to 2.5 nm/s. In: Proceedings of the 29th European Photovoltaic Energy Conference and Exhibition. Berlin: WIP, 2014, s. 1917-1920. ISBN 3-936338-34-5. Dostupné z: http://www.eupvsec-proceedings.com/proceedings?fulltext=holovsky&paper=28281
Počet záznamů: 1