Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations

HRABINA, Jan, LAZAR, Josef, ČÍP, Ondřej. Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations. In: Optical Micro- and Nanometrology IV, (Proceedings of SPIE ). Vol. 8430. Bellingham: SPIE, 2012, 84301D:1-9. Photonic Europe 2012. ISBN 978-0-8194-9122-0. ISSN 0277-786X. Dostupné z: doi: 10.1117/12.922439