Evaluation of mechanical properties of DLC layers using the resonant ultrasound spectroscopy and AFM tip

0356884 - FZÚ 2011 DE eng A - Abstrakt
Kocourek, Tomáš - Růžek, Michal - Landa, Michal - Jelínek, Miroslav - Remsa, Jan
Evaluation of mechanical properties of DLC layers using the resonant ultrasound spectroscopy and AFM tip.
Twelfth International Conference on Plasma Surface Engineering. Dresden: Europäische Forschungsgesellschaft Dünne Schichten e.V. (EFDS), 2010. s. 572. ISBN N.
[International Conference on Plasma Surface Engineering /12./. 13.09.2010-17.09.2010, Garmisch-Partenkirchen]
Grant CEP: GA ČR(CZ) GA101/09/0702
Výzkumný záměr: CEZ:AV0Z10100522; CEZ:AV0Z20760514
Klíčová slova: resonant ultrasound spectroscopy * pulsed laser deposition * diamond-like carbon * thin layer * AFM nanoindentation
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

Mechanical properties of diamond-like carbon (DLC) layers with gradient carbon-silicon interlayer were studied. The DLC layers were prepared by pulsed laser deposition and 30 nm thick SiC buffer layer by combination of PLD and DC magnetron sputtering. Dynamical mechanical properties were studied by newly developed method of resonant ultrasound spectroscopy (RUS) and results were compared with quasi-statical quantities - Young’s modulus and hardness, obtained by nanoindentation using AFM tip. RUS evaluates the elastic coefficients from resonant frequency shifts caused by deposition of the surface layer on the known substrate. We obtained elastic constants of the film dominantly from in-plane vibration. Whereas the static local effective Young modulus in the direction perpendicular to the surface is the result of nanoindentation technique.
Trvalý link: http://hdl.handle.net/11104/0195291