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Silicon surface patterning by regular stripes of laser-induced periodic surface structures
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$a Silicon surface patterning by regular stripes of laser-induced periodic surface structures 215 $a 8 s. 463 -1
$1 001 cav_un_epca*0256173 $1 011 $a 0169-4332 $e 1873-5584 $1 200 1 $a Applied Surface Science $v Roč. 605, Dec. (2022) $1 210 $c Elsevier 610 $a femtosecond laser processing 610 $a laser beam scanning 610 $a low spatial frequency LIPSS 610 $a LSFL 610 $a laser-induced amorphization 700 -1
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