Method of low-temperature plasma generation, method of an electrically conductive or ferromagnetic tube coating using pulsed plasma and corresponding devices.

0550970 - FZÚ 2022 RIV eng P - Patentový dokument
Hubička, Zdeněk - Čada, Martin - Kšírová, Petra - Klinger, Miloslav
Method of low-temperature plasma generation, method of an electrically conductive or ferromagnetic tube coating using pulsed plasma and corresponding devices.
2021. Vlastník: Fyzikální ústav AV ČR, v. v. i. Datum udělení patentu: 10.03.2021. Číslo patentu: EP3788181A1
Grant CEP: GA MŠMT(CZ) EF16_019/0000760
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: thin films * hollow cathode discharge * deposition * RF plasma * pulsed plasma * hollow tube
Obor OECD: Coating and films
https://worldwide.espacenet.com/patent/search/family/063713983/publication/EP3788181A1?q=EP3788181A1

The present EU patent (EP3788181A1) resides in the unifying idea of ​​synchronizing a positive voltage pulse supplied to an electrically conductive or ferromagnetic tube and a exciting negative voltage pulse on a hollow cathode induced on the background of a high-frequency capacitive discharge. In one embodiment, the invention relates to a method of generating low-temperature plasma in a vacuum chamber comprising a hollow cathode and an electrode, the method comprising the step of igniting the pulsed DC discharge in the hollow cathode wherein the positive voltage pulse at least partially overlaps with the negative voltage pulse, and the positive voltage pulse at least partially overlaps with the negative voltage pulse on the hollow cathode.

Trvalý link: http://hdl.handle.net/11104/0326291