Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer

Materna Mikmeková, Eliška; Müllerová, Ilona; Frank, Luděk; Paták, Aleš; Polčák, J.; Sluyterman, S.; Lejeune, M.; Konvalina, Ivo

doi:https://dx.doi.org/10.1016/j.elspec.2019.06.005

Počet záznamů: 1

Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer

1.

SYSNO ASEP	0525529
Druh ASEP	J - Článek v odborném periodiku
Zařazení RIV	J - Článek v odborném periodiku
Poddruh J	Článek ve WOS
Název	Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer
Tvůrce(i)	Materna Mikmeková, Eliška (UPT-D)_{ORCID, RID, SAI} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID} Paták, Aleš (UPT-D)_{RID, ORCID, SAI} Polčák, J. (CZ) Sluyterman, S. (NL) Lejeune, M. (FR) Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI}
Celkový počet autorů	8
Číslo článku	146873
Zdroj.dok.	Journal of Electron Spectroscopy and Related Phenomena. - : Elsevier - ISSN 0368-2048 Roč. 241, MAY (2020)
Poč.str.	7 s.
Forma vydání	Tištěná - P
Jazyk dok.	eng - angličtina
Země vyd.	NL - Nizozemsko
Klíč. slova	graphene ; PMMA ; slow electron treatment ; XPS ; Raman spectroscopy
Vědní obor RIV	JA - Elektronika a optoelektronika, elektrotechnika
Obor OECD	Electrical and electronic engineering
CEP	TE01020118 GA TA ČR - Technologická agentura ČR
	LO1212 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy
	ED0017/01/01 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy
Způsob publikování	Open access
Institucionální podpora	UPT-D - RVO:68081731
UT WOS	000540723700016
EID SCOPUS	85069968563
DOI	10.1016/j.elspec.2019.06.005
Anotace	Two-dimensional materials, such as graphene, are usually prepared by chemical vapor deposition (CVD) on selected substrates, and their transfer is completed with a supporting layer, mostly polymethyl methacrylate (PMMA). Indeed, the PMMA has to be removed precisely to obtain the predicted superior properties of graphene after the transfer process. We demonstrate a new and effective technique to achieve a polymer-free CVD graphene by utilizing low-energy electron irradiation in a scanning low-energy electron microscope (SLEEM). The influence of electron-landing energy on cleaning efficiency and graphene quality was observed by SLEEM, Raman spectroscopy (the presence of disorder D peak) and XPS (the deconvolution of the C 1s peak). After removing the absorbed molecules and polymer residues from the graphene surface with slow electrons, the individual graphene layers can also be distinguished outside ultra-high vacuum conditions in both the reflected and transmitted modes of a scanning low-energy (transmission) electron microscope.
Pracoviště	Ústav přístrojové techniky
Kontakt	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Rok sběru	2021
Elektronická adresa	https://www.sciencedirect.com/science/article/pii/S0368204818302068

Počet záznamů: 1