Počet záznamů: 1
Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas
SYS 0510668 LBL 01000a^^22220027750^450 005 20240103222852.1 014 $a 85049383387 $2 SCOPUS 014 $a 000436102000002 $2 WOS 017 70
$a 10.7567/JJAP.57.070311 $2 DOI 100 $a 20191108d m y slo 03 ba 101 0-
$a eng 102 $a JP 200 1-
$a Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas 215 $a 5 s. 463 -1
$1 001 cav_un_epca*0256838 $1 011 $a 0021-4922 $e 1347-4065 $1 200 1 $a Japanese Journal of Applied Physics $v Roč. 57, č. 7 (2018), s. 1-5 $1 210 $c Institute of Physics Publishing 608 $a Article 610 $a mid-IR laser pulses 610 $a EUV lithography applications 610 $a EUV emissions 700 -1
$3 cav_un_auth*0382196 $4 070 $a Amano $b R. $y JP 701 -1
$3 cav_un_auth*0349912 $a Dinh $b TH. $y JP 701 -1
$3 cav_un_auth*0328499 $a Sasanuma $b A. $y JP 701 -1
$3 cav_un_auth*0314396 $a Arai $b G. $y JP 701 -1
$3 cav_un_auth*0288444 $a Hara $b H. $y JP 701 -1
$3 cav_un_auth*0239107 $a Fujii $b Y. $y JP 701 -1
$3 cav_un_auth*0382197 $a Hatano $b T. $y JP 701 -1
$3 cav_un_auth*0349913 $a Ejima $b T. $y JP 701 -1
$3 cav_un_auth*0300442 $a Jiang $b W. $y JP 701 -1
$3 cav_un_auth*0371755 $a Sunahara $b A. $y US 701 -1
$3 cav_un_auth*0314308 $a Takahashi $b A. $y JP 701 -1
$3 cav_un_auth*0015104 $a Nakamura $b D. $y JP 701 -1
$3 cav_un_auth*0314309 $a Okada $b T. $y JP 701 -1
$3 cav_un_auth*0328501 $a Sakaue $b K. $y JP 701 -1
$3 cav_un_auth*0301351 $a Miura $b Taisuke $p FZU-D $i Centrum HiLASE $j HiLASE Centre $w Development of Lasers and Advanced Technologies (HiLASE) $y JP $T Fyzikální ústav AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0300445 $a O'Sullivan $b G. $y IE 701 -1
$3 cav_un_auth*0300441 $a Higashiguchi $b T. $y JP 856 $9 RIV $u https://doi.org/10.7567/jjap.57.070311
Počet záznamů: 1