Počet záznamů: 1
In situ XPS study of vacuum annealed diamond and DLC thin films
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SYSNO ASEP 0502226 Druh ASEP A - Abstrakt Zařazení RIV Záznam nebyl označen do RIV Zařazení RIV Není vybrán druh dokumentu Název In situ XPS study of vacuum annealed diamond and DLC thin films Tvůrce(i) Artemenko, Anna (FZU-D) RID, ORCID
Marton, M. (SK)
Romanyuk, Olexandr (FZU-D) RID, ORCID
Dragounová, Kateřina (FZU-D) ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAICelkový počet autorů 5 Zdroj.dok. 17th Joint Vacuum Conference - Book of abstracts. - Praha, 2018 / Mašek K. ; Jungwirthová I. ; Drbohlav J.
S. 140-141Poč.str. 2 s. Forma vydání Online - E Akce Joint Vacuum Conference /17./ Datum konání 10.09.2018 - 14.09.2018 Místo konání Olomouc Země CZ - Česká republika Typ akce WRD Jazyk dok. eng - angličtina Země vyd. CZ - Česká republika Klíč. slova NCD ; DLC ; in situ ; vacuum Vědní obor RIV BM - Fyzika pevných látek a magnetismus Obor OECD Condensed matter physics (including formerly solid state physics, supercond.) CEP GBP108/12/G108 GA ČR - Grantová agentura ČR Institucionální podpora FZU-D - RVO:68378271 Anotace Nanocrystalline diamond (NCD) and diamond-like carbon (DLC) films were proved to have unique surface properties useful for various applications, which are subjected to significant heating under operational conditions. In the present study, the thermal stability of H- or O-terminated NCD and DLC film surfaces were investigated. The as grown NCD and DLC surfaces were modified by RF plasma in appropriate gas mixtures. The H/O-NCD and DLC films were annealed up to 800°C in vacuum and analyzed in situ by XPS and ex situ by SEM and Raman spectroscopy. SEM and Raman measurements confirmed stability of annealed H/O-NCD samples. XPS analysis showed that oxygen concentration is reduced significantly (from 8 to 4 at.%) at 300°C and dropped almost to zero at 800 °C on O-NCD films. The O-DLC films have lost the oxygen slowly (from 13 to 6 at.% at 300°C). The vacuum annealing above 550°C resulted in both H- and O-DLC film delamination. This work was supported by the project GACR P108/12/G108. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2019
Počet záznamů: 1