Počet záznamů: 1
Slumping of Si wafers at high temperature
- 1.
SYSNO ASEP 0481625 Druh ASEP C - Konferenční příspěvek (mezinárodní konf.) Zařazení RIV Záznam nebyl označen do RIV Název Slumping of Si wafers at high temperature Tvůrce(i) Míka, M. (CZ)
Jankovský, O. (CZ)
Šimek, P. (CZ)
Lutyakov, O. (CZ)
Havlíková, R. (CZ)
Šofer, Z. (CZ)
Hudec, René (ASU-R) RID, ORCID
Pína, L. (CZ)
Inneman, A. (CZ)
Švéda, L. (CZ)
Maršíková, V. (CZ)Zdroj.dok. Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III. - Bellingham : SPIE, 2013 / Juha L. ; Bajt S. ; London R. ; Hudec R. ; Pína L. - ISBN 9780819495792 Poč.str. 7 s. Forma vydání Tištěná - P Akce Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III Datum konání 15.04.2013-18.04.2013 Místo konání Praha Země CZ - Česká republika Typ akce WRD Jazyk dok. eng - angličtina Země vyd. US - Spojené státy americké Klíč. slova silicon ; x-ray telescope ; thermal forming Vědní obor RIV BH - Optika, masery a lasery Obor OECD Electrical and electronic engineering Institucionální podpora ASU-R - RVO:67985815 UT WOS 000329577700027 EID SCOPUS 84880707914 DOI 10.1117/12.2021586 Anotace Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promising materials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400 degrees C. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy. We studied the effects of temperature, applied slumping force, heat-treatment time, crystal orientation, and furnace atmosphere on the shape and surface quality of the formed foils. Pracoviště Astronomický ústav Kontakt Radka Svašková, bibl@asu.cas.cz, Tel.: 323 620 326 Rok sběru 2018
Počet záznamů: 1