Počet záznamů: 1
The deposition of 3C-SiC thin films onto the (111) and (110) faces of Si using pulsed sputtering of a hollow cathode
- 1.Huguenin-Love, J.L., Lauer, N.T., Soukup, R. J., Ianno, N.J., Kment, Š., Hubička, Z. The deposition of 3C-SiC thin films onto the (111) and (110) faces of Si using pulsed sputtering of a hollow cathode. Materials Science Forum. 2010, 645-648(1-2), 131-134. ISSN 0255-5476. Dostupné z: doi: 10.4028/www.scientific.net/MSF.645-648.131
Počet záznamů: 1