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Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens
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SYSNO ASEP 0358594 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens Tvůrce(i) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDCelkový počet autorů 2 Zdroj.dok. Nuclear Instruments & Methods in Physics Research Section A. - : Elsevier - ISSN 0168-9002
Roč. 645, č. 1 (2011), s. 55-59Poč.str. 5 s. Jazyk dok. eng - angličtina Země vyd. NL - Nizozemsko Klíč. slova cathode lens ; compound objective lens ; aberration coefficients ; spot size ; field calculations Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika CEP GAP102/10/1410 GA ČR - Grantová agentura ČR IAA100650902 GA AV ČR - Akademie věd ED0017/01/01 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000292713900012 DOI 10.1016/j.nima.2010.12.232 Anotace The cathode lens is an electron optical element in an emission electron microscope accelerating electrons from the sample, which serves as a source for a beam of electrons. Special application consists in using the cathode lens first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons, made in the directly imaging low energy electron microscope or in its scanning version discussed here. In order to form a real image, the cathode lens has to be combined with a focusing magnetic lens or a focusing immersion-magnetic lens, as used for objective lenses of some commercial scanning electron microscopes. These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients and the spot size, as well as the optimum angular aperture of the primary beam. The important role of the final aperture size on the image resolution is also presented. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2012
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