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Why is it That Differently Doped Regions in Semiconductors are Visible in Low Voltage SEM?
- 1.EL GOMATI, M. M., WELLS, T. C. R., MÜLLEROVÁ, I., FRANK, L., JAYAKODY, H. Why is it That Differently Doped Regions in Semiconductors are Visible in Low Voltage SEM? IEEE Transactions on Electron Devices. 2004, 51(2), 288-292. ISSN 0018-9383. E-ISSN 1557-9646.
Počet záznamů: 1