Počet záznamů: 1
STEM detector in SEM
- 1.0502126 - ÚPT 2019 NL eng A - Abstrakt
Konvalina, Ivo - Paták, Aleš - Materna Mikmeková, Eliška - Müllerová, Ilona
STEM detector in SEM.
FEELIS-III. Amsterdam: ARCNL, 2018. s. 55-56.
[LEELIS-III. Low Energy Elwctrons: Lithography, Imaging and Soft Matter. 12.11.2018-13.11.2018, Amsterdam]
Grant CEP: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institucionální podpora: RVO:68081731
Klíčová slova: STEM * SEM
Obor OECD: Electrical and electronic engineering
Nowadays, scanning electron microscopes (SEM) are commonly equipped with technique for svanning transmission electron microscopy (STEM). The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscope is used to detect transmitted electrons (TEs).
Trvalý link: http://hdl.handle.net/11104/0294115
Počet záznamů: 1