Počet záznamů: 1
FIB Induced Damage Examined with the Low Energy SEM
- 1.0365942 - ÚPT 2012 RIV JP eng J - Článek v odborném periodiku
Mikmeková, Šárka - Matsuda, K. - Watanabe, K. - Ikeno, S. - Müllerová, Ilona - Frank, Luděk
FIB Induced Damage Examined with the Low Energy SEM.
Materials Transactions. Roč. 52, č. 3 (2011), s. 292-296. ISSN 1345-9678. E-ISSN 1347-5320
Grant CEP: GA MŠMT OE08012
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: scanning low energy electron microscopy * focused ion beam * beam induced damage * sputtering
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Impakt faktor: 0.699, rok: 2011
The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga(+) ions at various energies (10, 20, 30, and 40 keV) and incident angles (0 degrees, 30 degrees, 45 degrees, and 60 degrees). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.
Trvalý link: http://hdl.handle.net/11104/0201068
Počet záznamů: 1