Počet záznamů: 1
Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings
- 1.0134359 - FZU-D 20030257 RIV NL eng J - Článek v odborném periodiku
Maček, M. - Mišina, Martin - Čekada, M. - Panjan, P.
Energy-resolved mass spectroscopy of Ar-C2H2-N2 plasma, performed during ion plating of TiC and Ti N hard coatings.
Surface and Coatings Technology. 174-175, - (2003), s. 943-946. ISSN 0257-8972.
[International Conference on Plasma Surface Engineering /11./. Garmisch-Partenkirchen, 09.09.2002-13.09.2002]
Výzkumný záměr: CEZ:AV0Z1010914
Klíčová slova: energy-resolved mass spectroscopy * Ar-C2H2-N2 plasma * ion plating
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.410, rok: 2003
Energy resolved mass spectroscopy studies during the discharge in Ar+N2+C2H2 gas mixture in a triode ion plating apparatus Balzers BAI 730 reveals a high degree of acetylene decomposition under typical condition suitable for Cr and Ti evaporation. The most abundant neutral species beside Ar in the case of Ar+C2H2 gas mixture is hydrogen and acetylene as could be expected.
Trvalý link: http://hdl.handle.net/11104/0032264
Počet záznamů: 1