Počet záznamů: 1
A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment
- 1.0132075 - FZU-D 980328 RIV GB eng J - Článek v odborném periodiku
Špatenka, P. - Leipner, I. - Vlček, J. - Musil, Jindřich
A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment.
Plasma Sources Science & Technology. Roč. 6, - (1997), s. 46-52. ISSN 0963-0252. E-ISSN 1361-6595
Grant CEP: GA ČR GV106/96/K245
Trvalý link: http://hdl.handle.net/11104/0030113
Počet záznamů: 1