Study of Dielectric Nanolayers and Multilayer Coated Emitters

0574102 - ÚPT 2024 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Burda, Daniel - Allaham, Mohammad M. - Horáček, Miroslav - Knápek, A.
Study of Dielectric Nanolayers and Multilayer Coated Emitters.
2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC). New York: IEEE, 2023, s. 53-54. ISBN 979-8-3503-0143-4. ISSN 2164-2370.
[International Vacuum Nanoelectronics Conference (IVNC) /36./. Cambridge, MA (US), 10.07.2023-13.07.2023]
Výzkumná infrastruktura: CzechNanoLab II - 90251
Institucionální podpora: RVO:68081731
Klíčová slova: Cold Field Emission * Multilayer Dielectric Structure * Tungsten Tips * Electron Tunneling * Atomic Layer Deposition
Obor OECD: Materials engineering
https://ieeexplore.ieee.org/document/10188949

We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3, HfO2, which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.
Trvalý link: https://hdl.handle.net/11104/0344865