Silver vapor supersonic jets: expansion dynamics, cluster formation, and film deposition

0573862 - FZÚ 2024 RIV CH eng J - Článek v odborném periodiku
Bulgakov, Alexander - Bykov, N.Y. - Safonov, A.I. - Shukhov, Y.G. - Starinskiy, S.V.
Silver vapor supersonic jets: expansion dynamics, cluster formation, and film deposition.
Materials. Roč. 16, č. 13 (2023), č. článku 4876. E-ISSN 1996-1944
Grant CEP: GA MŠMT EF15_003/0000445
Grant ostatní: OP VVV - BIATRI(XE) CZ.02.1.01/0.0/0.0/15_003/0000445
Institucionální podpora: RVO:68378271
Klíčová slova: silver * supersonic vapor jets * nozzle expansion * atomic clusters * thin films * nucleation * metal nanostructures * mass spectrometry * direct-simulation Monte Carlo
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 3.4, rok: 2022
Způsob publikování: Open access

Supersonic jets of metal vapors with carrier gas are promising for producing nanostructured metal films at relatively low source temperatures and high deposition rates.Effects of the carrier gas on the jet composition and expansion dynamics,as well as on film properties,remain virtually unexplored.In this work,the free-jet expansion of a mixture of silver vapor with helium in a rarefied regime at an initial temperature of 1373 K is investigated through mass spectrometry and direct-simulation Monte Carlo methods.Introducing the carrier gas into the source is found to result in a transition from a collisionless to a collision-dominated expansion regime and dramatic changes in the Ag jet,which becomes denser,faster,and more forward-directed.The changes are shown to be favorable for the formation of small Ag clusters and film deposition.At a fairly high helium flow,silver Ag2 dimers are observed in the jet,both in the experiment and the simulations,with a mole fraction reaching 0.1%.
Trvalý link: https://hdl.handle.net/11104/0344221