Impact of Supersonic Flow in Scintillator Detector Apertures on the Resulting Pumping Effect of the Vacuum Chambers

0573547 - ÚPT 2024 RIV CH eng J - Článek v odborném periodiku
Maxa, Jiří - Neděla, Vilém - Šabacká, P. - Binar, T.
Impact of Supersonic Flow in Scintillator Detector Apertures on the Resulting Pumping Effect of the Vacuum Chambers.
Sensors. Roč. 23, č. 10 (2023), č. článku 4861. E-ISSN 1424-8220
Grant CEP: GA ČR(CZ) GA22-25799S
Institucionální podpora: RVO:68081731
Klíčová slova: Ansys Fluent * ESEM * scintillation detector * critical flow * one-dimensional flow theory * aperture * pressure sensor
Obor OECD: Electrical and electronic engineering
Impakt faktor: 3.9, rok: 2022
Způsob publikování: Open access
https://www.mdpi.com/1424-8220/23/10/4861

The article describes the combination of experimental measurements with mathematical–physics analyses in flow investigation in the chambers of the scintillator detector, which is a part of the environmental scanning electron microscope. The chambers are divided with apertures by small openings that keep the desirable pressure differences between three chambers: The specimen chamber, the differentially pumped intermediate chamber, and the scintillator chamber. There are conflicting demands on these apertures. On the one hand, the diameter of the apertures must be as big as possible so that they incur minimal losses of the passing secondary electrons. On the other hand, it is possible to magnify the apertures only to a certain extent so the rotary and turbomolecular vacuum pump can maintain the required operating pressures in separate chambers. The article describes the combination of experimental measurement using an absolute pressure sensor and mathematical physics analysis to map all the specifics of the emerging critical supersonic flow in apertures between the chambers. Based on the experiments and their tuned analyses, the most effective variant of combining the sizes of each aperture concerning different operating pressures in the detector is determined. The situation is made more difficult by the described fact that each aperture separates a different pressure gradient, so the gas flow through each aperture has its own characteristics with a different type of critical flow, and they influence each other, thereby influencing the final passage of secondary electrons detected by the scintillator and thus affecting the resulting displayed image.
Trvalý link: https://hdl.handle.net/11104/0344056