The role of the pulsed laser deposition in different growth atmospheres on the gas-sensing properties of ZnO films

0572400 - FZÚ 2024 RIV NL eng J - Článek v odborném periodiku
Syed, K. - Krstulović, N. - Casanova-Chafer, J. - Llobet, E. - Guell, F. - Martinez-Alanis, P.R. - Marciuš, M. - Shagieva, Ekaterina - Ristić, D. - Gebavi, H. - Baran, N. - Ivanda, M.
The role of the pulsed laser deposition in different growth atmospheres on the gas-sensing properties of ZnO films.
Sensors and Actuators B - Chemical. Roč. 382, May (2023), č. článku 133454. E-ISSN 0925-4005
Institucionální podpora: RVO:68378271
Klíčová slova: ZnO * PLD technique * different atmospheres * gas sensors * photoluminescence * surface defects * enhanced recovery * NO₂
Obor OECD: Materials engineering
Impakt faktor: 8.4, rok: 2022
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.snb.2023.133454

ZnO films were fabricated by pulsed laser deposition using two different background atmospheres (argon/vacuum). The gas-sensing properties of these materials against reducing and oxidizing gases were examined. The microstructure and crystal symmetry of the deposited films were studied with X-ray diffraction (XRD), Scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), Raman, and Photoluminescence (PL) spectroscopy. The XRD studies revealed that the ZnO films grown in an argon environment are highly textured in the c-axis with a hexagonal crystalline structure. The c-axis is perpendicular to the substrate plane orientation (002) compared to (100) plane orientation, which is developed in a vacuum environment. Usually, this orientation (100) is difficult to obtain. Raman scattering spectra for both types of ZnO films revealed the characteristic E2 (high) mode that is related to the vibration of oxygen atoms in wurtzite ZnO.
Trvalý link: https://hdl.handle.net/11104/0344710