Contamination mitigation strategy for SEMs

0571242 - ÚPT 2023 RIV CZ eng O - Ostatní výsledky
Müllerová, Ilona - Materna Mikmeková, Eliška - Konvalina, Ivo
Contamination mitigation strategy for SEMs.
2022
Grant CEP: GA TA ČR(CZ) TN01000008
Institucionální podpora: RVO:68081731
Klíčová slova: contamination * low energy electron microscopy * 2D crystals
Obor OECD: Materials engineering

Müllerová, I., Materna-Mikmeková, E., Konvalina, I. Contamination mitigation strategy for SEMs. TN01000008/30-V003. 2022. Contamination in modern electron microscopy is at the forefront of interest and mainly concerns the deposition of a carbon based film on the surface from adsorbed hydrocarbons. The report deals with effects describing the growth/removal of contamination caused by electron irradiation and to describe in detail the influence of electron beam parameters on the balance between deposition and desorption processes.
Trvalý link: https://hdl.handle.net/11104/0342513