Comparative determination of atomic boron and carrier concentration in highly boron doped nano-crystalline diamond

0570673 - FZÚ 2024 RIV CH eng J - Článek v odborném periodiku
Taylor, Andrew - Ashcheulov, Petr - Hubík, Pavel - Weiss, Zdeněk - Klimša, Ladislav - Kopeček, Jaromír - Hrabovský, Jan - Veis, M. - Lorinčík, J. - Elantyev, I. - Mortet, Vincent
Comparative determination of atomic boron and carrier concentration in highly boron doped nano-crystalline diamond.
Diamond and Related Materials. Roč. 135, May (2023), č. článku 109837. ISSN 0925-9635. E-ISSN 1879-0062
Grant CEP: GA ČR(CZ) GA20-03187S; GA MŠMT(CZ) EF16_019/0000760; GA MŠMT EF15_003/0000445
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; OP VVV - BIATRI(XE) CZ.02.1.01/0.0/0.0/15_003/0000445
Výzkumná infrastruktura: CzechNanoLab - 90110; CzechNanoLab II - 90251
Institucionální podpora: RVO:68378271
Klíčová slova: diamond * boron-doped * estimation * spectroscopic * relative * hall
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 4.1, rok: 2022
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.diamond.2023.109837

We have compared the total boron content and hole carrier concentration values obtained from various destructive and non-destructive quantification methods in boron doped nano-crystalline diamond films prepared over a range of doping levels, using microwave plasma enhanced chemical vapour deposition. Destructive secondary-ion mass spectrometry and relatively unreported glow discharge optical emission spectrometry were complemented by non-destructive Raman, spectroscopic ellipsometry and van der Pauw Hall measurements. Measurement techniques are discussed, including details of the glow discharge optical emission spectrometry technique, use of different laser powers and wavelengths, fitting parameters for Raman spectroscopy, and improved ellipsometry modelling. Finally, measured values are compared and discussed regarding their viability for estimation of total boron and electrically active boron in doped nano-crystalline diamond layers.
Trvalý link: https://hdl.handle.net/11104/0342007