Effect of oxygen defects on microstructure, optical and vibrational properties of ScN films deposited on MgO substrate from experiment and first principles

0569725 - FZÚ 2024 RIV NL eng J - Článek v odborném periodiku
More Chevalier, Joris - Wdowik, U. D. - Legut, D. - Cichoň, Stanislav - de Prado, Esther - Gregora, Ivan - Bulíř, Jiří - Novotný, Michal - Fekete, Ladislav - Lančok, Ján
Effect of oxygen defects on microstructure, optical and vibrational properties of ScN films deposited on MgO substrate from experiment and first principles.
Applied Surface Science. Roč. 615, Apr. (2023), č. článku 156203. ISSN 0169-4332. E-ISSN 1873-5584
Výzkumná infrastruktura: e-INFRA CZ - 90140
Institucionální podpora: RVO:68378271
Klíčová slova: oxidation * X-ray photoelectron spectroscopy * scandium nitride * thin film
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 6.7, rok: 2022
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.apsusc.2022.156203

We report on the effects of oxygen impurities on the microstructure, surface morphology, optical absorption, and vibrational properties of scandium nitride thin films deposited onto magnesium oxide substrate by reactive magnetron sputtering and under ultrahigh vacuum conditions. Two distinct deposition temperatures of 700 ◦C and 800 ◦C were applied to adjust the level of oxygen contamination. The ScN/MgO(001) thin films have been characterized by various spectroscopic methods, including X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, Raman spectroscopy, and optical microscopy.
Trvalý link: https://hdl.handle.net/11104/0341751