Characterizing optical phase-change materials with spectroscopic ellipsometry and polarimetry

0568882 - FZÚ 2023 RIV CH eng J - Článek v odborném periodiku
Gutiérrez, Y. - Espinoza Herrera, Shirly J. - Zahradník, Martin - Khakurel, Krishna - Resl, J. - Cobet, C. - Hingerl, K. - Duwe, M. - Thiesen, P. - Losurdo, M.
Characterizing optical phase-change materials with spectroscopic ellipsometry and polarimetry.
Thin Solid Films. Roč. 763, DEC (2022), č. článku 139580. ISSN 0040-6090. E-ISSN 1879-2731
Grant CEP: GA MŠMT EF16_019/0000789; GA MŠMT EF15_003/0000447; GA MŠMT(CZ) LM2018141
Grant ostatní: OP VVV - ADONIS(XE) CZ.02.1.01/0.0/0.0/16_019/0000789; OP VVV - ELIBIO(XE) CZ.02.1.01/0.0/0.0/15_003/0000447
Institucionální podpora: RVO:68378271
Klíčová slova: ellipsometry * polarimetry * phase -change materials
Obor OECD: Particles and field physics
Impakt faktor: 2.1, rok: 2022
Způsob publikování: Open access

This paper discusses the fundamentals, applications, potential and limitations of polarized light reflection techniques for the characterization of phase-change materials (PCMs). These techniques include spectroscopic ellipsometry, time-resolved ellipsometry and imaging ellipsometry as well as polarimetry. We explore the ca-pabilities of spectroscopic ellipsometry in the determination of the extinction coefficient of PCMs and the ca-pabilities of imaging ellipsometry to characterize PCMs. We show that ellipsometry is capable of more than the determination of thickness and optical properties, and it can be exploited to gain information about crystalli-zation/amorphization kinetics and mapping anisotropies.
Trvalý link: https://hdl.handle.net/11104/0340160