Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters

0568824 - ÚPT 2023 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Burda, Daniel - Knápek, Alexandr
Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters.
Proceedings II of the 28th Conference STUDENT EEICT 2022. Selected Papers. Brno: Brno University of Technology, Faculty of Electrical Engineering and Communication, 2022 - (Novák, V.), s. 255-258. ISBN 978-80-214-6030-0. ISSN 2788-1334.
[STUDENT EEICT 2022 /28./. Brno (CZ), 26.04.2022-26.04.2022]
Výzkumná infrastruktura: CzechNanoLab - 90110
Institucionální podpora: RVO:68081731
Klíčová slova: Cold field emission * single-tip field emitters * tungsten tip * aluminum oxide * dielectric coatings * Murphy-Good plot
Obor OECD: Particles and field physics
https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2022_sbornik_2_v3.pdf

This research aims to obtain a more in-depth understanding of the field emission properties of tungsten single-tip field emitters (STFEs) coated with a several tens of nanometer thin barrier of Al2O3. The introduction of an additional barrier into the metal-vacuum interface system of the emitter can be beneficial to improve its performance. The tungsten emitters were prepared using a two-step electrochemical drop-off etching technique. Thin oxide barrier coatings were prepared by using low-temperature atomic layer deposition (ALD), a chemical vapor deposition technique. Field emission was studied in an internally developed field emission microscope (FEM) working in UHV vacuum (< 1·10−7 Pa), and the experimental field emission data were analyzed by the so-called Murphy-Good plotsThe value of the local work function of the grown oxide layer were investigated using Ultra-violet photoelectron spectroscopy (UPS).
Trvalý link: https://hdl.handle.net/11104/0340092