Optical anisotropy of glancing angle deposited thin films on nano-patterned substrates

0566321 - FZÚ 2023 RIV US eng J - Článek v odborném periodiku
Grineviciute, L. - Moein, T. - Han, M. - Ng, S.H. - Anand, V. - Katkus, T. - Ryu, M. - Morikawa, J. - Tobin, M.J. - Vongsvivut, J. - Tolenis, Tomas - Juodkazis, S.
Optical anisotropy of glancing angle deposited thin films on nano-patterned substrates.
Optical Materials Express. Roč. 12, č. 3 (2022), s. 1281-1290. ISSN 2159-3930
Institucionální podpora: RVO:68378271
Klíčová slova: birefringence * laser
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 2.8, rok: 2022
Způsob publikování: Open access

This study has demonstrated that 3D columnar micro-films/coatings can be deposited over pre-patterned surfaces with sub-micrometer periodic patterns. Four-angle polarisation analysis of thin (0.4 − 1∼µm) Si and SiO2 films, evaporated via glancing angle deposition (GLAD) at 70° to the normal, was carried out in reflection mode using synchrotron infrared microspectroscopy at the Australian Synchrotron. The angular dependence of absorbance followed A(θ) ∝ cos 2 θ, confirmed for Si substrates patterned by electron beam lithography and plasma etching, which were used to make checkerboard patterns of Λ = 0.4∼µm period on Si. Retardance control by birefringence of a patterned SiO2 substrate coated by columnar SiO2 is promising for UV-visible applications due to the use of the same material to endow polarisation control.
Trvalý link: https://hdl.handle.net/11104/0337688