Swing arm profilometer as a tool for measuring the shape of large optical surfaces

0565164 - FZÚ 2023 RIV DE eng J - Článek v odborném periodiku
Michal, Stanislav - Horváth, P. - Hrabovský, M. - Chytka, Ladislav - Mandát, Dušan - Nožka, Libor - Palatka, Miroslav - Pech, Miroslav - Schovánek, Petr - Vacula, Martin
Swing arm profilometer as a tool for measuring the shape of large optical surfaces.
Optik. Roč. 264, Aug (2022), č. článku 169419. ISSN 0030-4026. E-ISSN 1618-1336
Institucionální podpora: RVO:68378271
Klíčová slova: swing arm profilometer * interferometer * non-contact interferometric probe * laser tracker * stitching surface shape
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 3.1, rok: 2022
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.ijleo.2022.169419

Swing arm profilometers (SAP) are one of the few options for accurately measuring the shape of large optical surfaces. The data obtained by accurate measurements are essential for the refinement of the manufacturing process and certification of finished products. In this paper, the principle of these devices is described using the example of SAP measuring device supplied to the Joint Laboratory of Optics in Olomouc (JLO) by Zeeko Ltd. Device modifications and new procedures that have simplified the adjustment of the SAP and had a positive impact on the accuracy of the measurements are also presented. Some of these principles and modifications can be applied to other SAP devices, as well. The results of several sample measurements on the SAP device are compared with measurements on Zygo Verifire digital interferometer and Zeiss Contura G2 HTG portal coordinate measuring machine.
Trvalý link: https://hdl.handle.net/11104/0336671