Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N.sub.2./sub. and Ar + O.sub.2./sub. gas mixtures

0564937 - FZÚ 2023 RIV DE eng J - Článek v odborném periodiku
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N₂ and Ar + O₂ gas mixtures.
European Physical Journal D. Roč. 76, č. 11 (2022), č. článku 214. ISSN 1434-6060. E-ISSN 1434-6079
Grant CEP: GA ČR(CZ) GA21-04477S; GA MŠMT(CZ) EF16_019/0000760
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: plasma jet * plasma sputtering * ion * oxygen * nitrogen
Obor OECD: Fluids and plasma physics (including surface physics)
Impakt faktor: 1.8, rok: 2022
Způsob publikování: Open access

A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N2 or Ar + O2 gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar+ and Ar2+ ions and molecular N2+ or O2+ ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
Trvalý link: https://hdl.handle.net/11104/0336517