Impact of sintering temperature on phase composition, microstructure, and porosification behavior of LTCC substrates

0561898 - FZÚ 2023 RIV GB eng J - Článek v odborném periodiku
Hajian, A. - Artemenko, Anna - Kromka, Alexander - Schwarz, S. - Schneider, M. - Dragounová, Kateřina - Adaikkan, M. - Zellner, C. - Schmid, U.
Impact of sintering temperature on phase composition, microstructure, and porosification behavior of LTCC substrates.
Journal of the European Ceramic Society. Roč. 42, č. 13 (2022), s. 5789-5800. ISSN 0955-2219. E-ISSN 1873-619X
Výzkumná infrastruktura: CzechNanoLab - 90110
Institucionální podpora: RVO:68378271
Klíčová slova: LTCC * sintering * glass-ceramics * porosification * crystallization
Obor OECD: Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Impakt faktor: 5.7, rok: 2022
Způsob publikování: Open access

Phase development and changes in crystalline composition of LTCC material during the sintering process were investigated using in-situ XRD measurements. The chemical characterization and microstructural analyses of the tapes sintered with some representative firing profiles were performed by techniques such as (scanning) transmission electron microscope, energy-dispersive X-ray spectroscopy, Raman spectroscopy, XPS, and XRD. Moreover, the porosification behavior of LTCC substrates fired at different peak temperatures was studied. These investigations are important for the subsequent wet chemical etching, representing an approach which allows to reduce locally the permittivity of LTCC tapes. Treatment with a KOH solution shows non-selective etching behavior for all substrates. In addition, highly porous silica structures corresponding to Ca and Al depletion from the anorthite phase were observed in all samples after etching treatment.

Trvalý link: https://hdl.handle.net/11104/0334324