Silicon surface patterning by regular stripes of laser-induced periodic surface structures

0561604 - FZÚ 2023 RIV NL eng J - Článek v odborném periodiku
Sládek, Juraj - Levy, Yoann - Derrien, Thibault - Bryknar, Z. - Bulgakova, Nadezhda M.
Silicon surface patterning by regular stripes of laser-induced periodic surface structures.
Applied Surface Science. Roč. 605, Dec. (2022), č. článku 154664. ISSN 0169-4332. E-ISSN 1873-5584
Grant CEP: GA MŠMT EF15_003/0000445
Grant ostatní: OP VVV - BIATRI(XE) CZ.02.1.01/0.0/0.0/15_003/0000445
Institucionální podpora: RVO:68378271
Klíčová slova: femtosecond laser processing * laser beam scanning * low spatial frequency LIPSS * LSFL * laser-induced amorphization
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 6.7, rok: 2022
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.apsusc.2022.154664

Laser-induced periodic surface structures (LIPSS) formation on the surface of mono-crystalline silicon is reported for a specific fabrication regime of large-area structuring. Using a femtosecond laser at 1030 nm wavelength, a particular range of fluence and beam overlap in two-dimensional scanning scheme has been identified where LIPSS-covered areas organize into stripes perpendicular to the scanning direction. The stripes, where the LIPSS appear, are regularly spaced and located in between the centers of two subsequent Gaussian pulses while the regions receiving the peak pulse fluence are free of LIPSS. The formation of the LIPSS stripes is examined by analyzing local integrated fluence, N-on-1 pulse damage geometry and thresholds of modifications. Processes at play in the generation of such stripes of LIPSS are discussed and an explanation based on interpulse feedback from amorphized areas is proposed.
Trvalý link: https://hdl.handle.net/11104/0334181