Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures

0556001 - FZÚ 2023 RIV NL eng J - Článek v odborném periodiku
Domonkos, M. - Jackivová, Rajisa - Pathó, A.
Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures.
Microelectronic Engineering. Roč. 251, Jan (2022), č. článku 111635. ISSN 0167-9317. E-ISSN 1873-5568
Výzkumná infrastruktura: CzechNanoLab - 90110
Institucionální podpora: RVO:68378271
Klíčová slova: image analysis * nanosphere lithography * defect detection * hexagonal ordering * scanning electron microscopy * Python
Obor OECD: Electrical and electronic engineering
Impakt faktor: 2.3, rok: 2022
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.mee.2021.111635

Verification of ordering and symmetry is essential to enhance the nanofabrication process of periodic nano-structures. In this paper, we present the open-source software HEXI, which can detect circles and distinguish between perfect hexagonal ordering and defect configurations. The proposed user-friendly image analysis soft-ware (implemented in Python) consists of several stages. First, the algorithm identifies circular structures in microscopy (e.g., scanning electron microscopy, atomic force microscopy) images using the Canny edge detector and the Hough circle transform. Then, the detected circles are categorized as hexagonally ordered or non- hexagonally ordered (defects). This classification can be achieved using three different methods: variance in brightness (global or adaptive) and distance.
Trvalý link: http://hdl.handle.net/11104/0330401