Počet záznamů: 1  

Bulk and interface second harmonic generation in the Si3N4 thin films deposited via ion beam sputtering

  1. 1.
    0555694 - ÚFP 2022 RIV GB eng J - Článek v odborném periodiku
    Das, Nirmal Kumar - Kanclíř, Vít - Mokrý, Pavel - Žídek, Karel
    Bulk and interface second harmonic generation in the Si3N4 thin films deposited via ion beam sputtering.
    Journal of Optics. Roč. 23, č. 2 (2021), č. článku 024003. ISSN 2040-8978. E-ISSN 2040-8986
    Grant CEP: GA MŠMT(CZ) EF16_026/0008390; GA ČR(CZ) GA19-22000S
    Grant ostatní: AV ČR(CZ) ERC100431901
    Program: ERC-CZ/AV
    Institucionální podpora: RVO:61389021
    Klíčová slova: silicon nitride * thin films * ellipsometry * second harmonic generation (SHG) * bulk * interface
    Obor OECD: Coating and films
    Impakt faktor: 2.077, rok: 2021
    Způsob publikování: Omezený přístup
    https://iopscience.iop.org/article/10.1088/2040-8986/abe450

    The nonlinear optical second harmonic generation (SHG) in Si3N4 has attracted considerable attention due to a variety of promising applications in optoelectronics. However, reports on SHG in Si3N4 thin films and microstructures lead to diverse conclusions about the SHG origin, pointing towards the Si3N4 bulk, as well as to the Si3N4-Si interface. Here we report on the measurement of polarization-resolved angle-dependent SHG in Si3N4 thin films in the reflective mode. This mode allowed us to measure the nonlinear response of Si3N4 thin films on the Si single crystal substrate. By measuring three samples deposited via ion beam sputtering, we were able to analyze the bulk and interface contributions. We have demonstrated that apart from the bulk SHG, the Si3N4-Si interface contributes with a significant amount of SHG for the thin sample (600 nm). Our result provides a link between the previous measurements in the Si3N4 thin films and on the microstructures.
    Trvalý link: http://hdl.handle.net/11104/0330158

     
     
Počet záznamů: 1  

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