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A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge
- 1.0552302 - FZÚ 2022 RIV GB eng J - Článek v odborném periodiku
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge.
Plasma Sources Science & Technology. Roč. 30, č. 4 (2021), č. článku 045003. ISSN 0963-0252. E-ISSN 1361-6595
Grant CEP: GA MŠMT(CZ) EF16_019/0000760; GA MPO FV20580; GA ČR GA19-00579S
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: hollow cathode discharge * magnetron sputtering discharge * positively biased anode * Langmuir probe diagnostics * energy-resolved ion mass spectrometry
Obor OECD: Coating and films
Impakt faktor: 4.124, rok: 2021
Způsob publikování: Open access
The performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. Energy-resolved mass spectrometry reveals that the kinetic energy of argon and titanium ions is enhanced by a positive anode voltage allowing for an effective energy control of plasma ions.
Trvalý link: http://hdl.handle.net/11104/0327434
Název souboru Staženo Velikost Komentář Verze Přístup 0552302.pdf 1 2.3 MB CC Licence Vydavatelský postprint povolen
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