Počet záznamů: 1  

Effect of the substrate crystalline orientation on the surface morphology and boron incorporation into epitaxial diamond layers

  1. 1.
    0551983 - FZÚ 2022 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Voves, J. - Pošta, A. - Davydova, Marina - Laposa, A. - Povolný, V. - Hazdra, P. - Lambert, Nicolas - Sedláková, Silvia - Mortet, Vincent
    Effect of the substrate crystalline orientation on the surface morphology and boron incorporation into epitaxial diamond layers.
    NANOCON 2020. 12th International Conference on Nanomaterials - Research & Application. Conference proceedings. Ostrava: TANGER, 2021, s. 98-102. ISBN 978-80-87294-98-7. ISSN 2694-930X.
    [International Conference NANOCON 2020 /12./. Brno (CZ), 21.10.2020-23.10.2020]
    Grant CEP: GA ČR(CZ) GA20-11140S; GA MŠMT(CZ) EF16_019/0000760
    Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
    Institucionální podpora: RVO:68378271
    Klíčová slova: diamond * epitaxy * defects * boron doping * Raman mapping
    Obor OECD: Coating and films

    Epitaxial growth of diamond is critically important for the fabrication of diamond-based electronic devices. The emerging study of the epitaxial diamond growth on the (113) vicinal surfaces evidences highly needed high growth rates and low structural defects concentrations with both p- and n-type doping. In this work, we compare the morphology and dopant concentration incorporation of heavily boron-doped (113) epitaxial diamond layers with conventionally studied (100) and (111) epitaxial layers. Epitaxial layers were grown using resonance cavity Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) system. The surface morphology of epitaxial layers was studied by optical microscopy and atomic force microscopy, whereas the boron incorporation homogeneity was determined by Raman spectroscopy mapping.
    Trvalý link: http://hdl.handle.net/11104/0327191

     
     
Počet záznamů: 1  

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