Hf.sub.1−x./sub.Zr.sub.x./sub.O.sub.2./sub./ZrO.sub.2./sub. nanolaminate thin films as a high‑κ dielectric

0551091 - FZÚ 2022 RIV US eng J - Článek v odborném periodiku
Kashir, Alireza - Farahani, M.G. - Kamba, Stanislav - Yadav, M. - Hwang, H.
Hf_1−xZr_xO₂/ZrO₂ nanolaminate thin films as a high‑κ dielectric.
ACS Applied Electronic Materials. Roč. 3, č. 12 (2021), s. 5632-5640. E-ISSN 2637-6113
Grant CEP: GA MŠMT(CZ) EF16_019/0000760; GA ČR(CZ) GA21-06802S
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: ferroelectric * antiferroelectric * thin films * permittivity
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 4.494, rok: 2021
Způsob publikování: Omezený přístup
https://doi.org/10.1021/acsaelm.1c01105

We investigated dielectric and structural properties of ~10 nm thin films consisting of stacked 1 nm thin ferroelectric (FE) Hf1−xZrxO2 (HZO(x)) and antiferroelectric (AFE) ZrO2 layers. At x < 0.5, the measurements of polarization vs electric field revealed pure FE hysteresis loops, whereas at x > 0.5, pinched hysteresis loops with some remnant polarization were observed, which indicate a coexistence of FE and AFE orderings. In this way, we demonstrate that the coexistence of FE and AFE orderings can be controlled by adjusting the composition of HZO(x) layers in the HZO(x)/ZrO2 nanolaminate films. At x = 0.5, the dielectric constant is ~ 60 in nanolaminate films, which is much higher than that of the conventional HZO(x) solid solution thin films. Structural investigations confirm a coexistence of polar orthorhombic and nonpolar tetragonal structures, which is consistent with the observed polarization hysteresis loops.
Trvalý link: http://hdl.handle.net/11104/0327442